Effect of RF Power and Sputtering Background Pressure on Structural Properties of a:Si


AKKAYA A., GÜNERİ E. , SOYLU M. Ç. , ÇETİN H., AYYILDIZ E.

2nd International Congress on Semiconductor Materials and Devices (ICSMD 2018), Ardahan, Turkey, 28 - 31 August 2018

  • Publication Type: Conference Paper / Summary Text
  • City: Ardahan
  • Country: Turkey