Effect of RF Power and Sputtering Background Pressure on Structural Properties of a:Si

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AKKAYA A., GÜNERİ E., SOYLU M. Ç., ÇETİN H., AYYILDIZ E.

2nd International Congress on Semiconductor Materials and Devices (ICSMD 2018), Ardahan, Turkey, 28 - 31 August 2018, (Summary Text)

• Publication Type: Conference Paper / Summary Text
• City: Ardahan
• Country: Turkey
• Erciyes University Affiliated: Yes