InP film samples are prepared by spray pyrolysis technique using aqueous solutions of InCl(3) and Na(2)HPO(4), which are atomized with compressed air as carrier gas onto glass substrates at 500 degrees C with different thicknesses of the films. The structural properties of the samples are determined by x-ray diffraction (XRD). It is found that the crystal structure of the InP films is polycrystalline hexagonal. The orientations of all the obtained films are along the c-axis perpendicular to the substrate. The electrical measurements of the samples are obtained by dc four-probe technique on rectangular-shape samples. The effects of temperature on the electrical properties of the InP films are studied in detail.