This study is based on X-ray diffraction (XRD) and DSC analysis, Scanning Electron Microscopy (SEM) and Optical Microscope observations and Vickers Micro Hardness Test results with structural effect and phase transformations on NiMnGa shape memory alloys with different composition. The addition of different elements to the shape-memory NiMnGa alloys and the heat treatment of the alloys are extremely useful for improving the shape memory, magnetic, mechanical, chemical and other physical properties. The NiMnGaMo alloys were successfully obtained using a vacuum induction melting furnace and then homogenized by heat treatment at 950 degrees C for 2, 24 and 96 h, respectively. After homogenization, all samples were cooled in ice water. Crystallographic results calculated from XRD data were evaluated by comparison with the data obtained by DSC analysis, Scanning Electron Microscope (SEM), Optical Microscope and Vickers Micro Hardness Test Device. The results show that the alloy with a higher Mo amount has a smaller crystallite size and the L2(1) lattice volume increases with heat treatment time. The change on microhardness values were discussed with the change on the obtained lattice constants. (C) 2020 Karabuk University. Publishing services by Elsevier B.V.