Multipass Sliding Wear Behavior of TiAlN Coatings Using a Spherical Indenter: Effect of Coating Parameters and Duplex Treatment


SAVAŞ S. , DANIŞMAN Ş.

TRIBOLOGY TRANSACTIONS, cilt.57, ss.242-255, 2014 (SCI İndekslerine Giren Dergi) identifier identifier

  • Cilt numarası: 57 Konu: 2
  • Basım Tarihi: 2014
  • Doi Numarası: 10.1080/10402004.2013.868564
  • Dergi Adı: TRIBOLOGY TRANSACTIONS
  • Sayfa Sayıları: ss.242-255

Özet

The properties and performance of thin ceramic coatings are largely affected by three factors: (1) deposition parameters, (2) pretreatments applied to substrates before coating deposition, and (3) physical arrangements about the deposition instrument such as arrangement of the target to substrate distance (TSD). In this study, the structural, mechanical, and tribological properties of magnetron-sputtered TiAlN coatings deposited on hardened and nitrided AISI H13 steel substrates and silicon wafers at different nitrogen partial pressures of 0.3, 0.6, and 1.2 mTorr; substrate bias voltages of 0, -100, and -200V; and TSDs of 6, 11, 16, and 21cm using a compound Ti0.5Al0.5 target were investigated and the combination effect of all factors was studied in detail. A CSEM-Revetest scratch tester was adapted for wear tests as a multipass sliding wear tester and Al2O3 ceramic balls were used as a counter material for TiAlN repetitive sliding. A 2(4) full-factorial experimental design was conducted to screen the significant factors influencing the wear resistance of the films. It was found that the hardness and mechanical properties of the coatings increased at low nitrogen pressure, high bias voltage, and short TSD. Furthermore, duplex treatment and nitrogen pressure were determined to be crucial parameters.

The properties and performance of thin ceramic coatings
are largely affected by three factors: (1) deposition parameters,
(2) pretreatments applied to substrates before coating deposi-tion, and (3) physical arrangements about the deposition in-strument such as arrangement of the target to substrate distance
(TSD). In this study, the structural, mechanical, and tribo-logical properties of magnetron-sputtered TiAlN coatings de-posited on hardened and nitridedAISIH13 steel substrates and
silicon wafers at different nitrogen partial pressures of 0.3, 0.6,
and 1.2 mTorr; substrate bias voltages of 0,−100, and−200 V;
and TSDs of 6, 11, 16, and 21 cm using a compound Ti0.5Al0.5
target were investigated and the combination effect of all fac-tors was studied in detail. A CSEM-Revetest scratch tester was
adapted for wear tests as a multipass sliding wear tester and
Al2O3ceramic balls were used as a counter material for TiAlN
repetitive sliding. A 2
4
full-factorial experimental design was
conducted to screen the significant factors influencing the wear
resistance of the films. It was found that the hardness and me-chanical properties of the coatings increased at low nitrogen
pressure, high bias voltage, and short TSD. Furthermore, du-plex treatment and nitrogen pressure were determined to be
crucial parameters.

KEY WORDS
Titanium Aluminium Nitride; Magnetron Sputtering; Duplex
Treatment; Multipass Sliding Wear