Proton exchange membrane electrolysis (PEMWE) producing low-carbon Ozone for application in green semiconductor manufacturing processes
INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, cilt.208, 2026 (SCI-Expanded, Scopus)
- Yayın Türü: Makale / Tam Makale
- Cilt numarası: 208
- Basım Tarihi: 2026
- Doi Numarası: 10.1016/j.ijhydene.2026.153516
- Dergi Adı: INTERNATIONAL JOURNAL OF HYDROGEN ENERGY
- Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Artic & Antarctic Regions, Chemical Abstracts Core, Chimica, Compendex, Environment Index, INSPEC
- Anahtar Kelimeler: Ozone production, Semiconductor wafer cleaning, Proton exchange membrane water electrolysis, stack, Stack scale-up
- Erciyes Üniversitesi Adresli: Evet
Özet
Various studies focused on small-scale Proton Exchange Membrane Water Electrolyzers (PEMWE) for Ozone (O-3) production. Nevertheless, industrial-scale applications have not yet been fully investigated. This work aims at scaling up PEMWE to a 7-cell 5 x 5 cm(2) stack and enhancing O-3 production to similar to 9 g/h for the semiconductor industry. The impact of a homemade Membrane Electrode Assembly (MEA), catalyst, fluid flow direction and flow rate on the performance and O-3 production were discussed. The homemade MEA with an active area of 5 x 5 cm(2) was integrated into the 7-cell stack. The optimal O-3 generation of 195 mg/L was obtained at 28 V and 35 A, achieving a FE% of 15.1 %. The Hydrogen (H-2) production rate was 1.90 L/min with a faraday efficiency (FE%) of 94 %. The high (O-3/H-2) generation validates the MEA's performance. Future plan aims at achieving 3000 h while maintaining acceptable O-3 generation and FE%.