Proton exchange membrane electrolysis (PEMWE) producing low-carbon Ozone for application in green semiconductor manufacturing processes

Abbas W., Jung G., Atabani A., Yu J., Chen P., Weng F., ...Daha Fazla

INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, cilt.208, 2026 (SCI-Expanded, Scopus) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 208
  • Basım Tarihi: 2026
  • Doi Numarası: 10.1016/j.ijhydene.2026.153516
  • Dergi Adı: INTERNATIONAL JOURNAL OF HYDROGEN ENERGY
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Artic & Antarctic Regions, Chemical Abstracts Core, Chimica, Compendex, Environment Index, INSPEC
  • Anahtar Kelimeler: Ozone production, Semiconductor wafer cleaning, Proton exchange membrane water electrolysis, stack, Stack scale-up
  • Erciyes Üniversitesi Adresli: Evet

Özet

Various studies focused on small-scale Proton Exchange Membrane Water Electrolyzers (PEMWE) for Ozone (O-3) production. Nevertheless, industrial-scale applications have not yet been fully investigated. This work aims at scaling up PEMWE to a 7-cell 5 x 5 cm(2) stack and enhancing O-3 production to similar to 9 g/h for the semiconductor industry. The impact of a homemade Membrane Electrode Assembly (MEA), catalyst, fluid flow direction and flow rate on the performance and O-3 production were discussed. The homemade MEA with an active area of 5 x 5 cm(2) was integrated into the 7-cell stack. The optimal O-3 generation of 195 mg/L was obtained at 28 V and 35 A, achieving a FE% of 15.1 %. The Hydrogen (H-2) production rate was 1.90 L/min with a faraday efficiency (FE%) of 94 %. The high (O-3/H-2) generation validates the MEA's performance. Future plan aims at achieving 3000 h while maintaining acceptable O-3 generation and FE%.