INTERNATIONAL JOURNAL OF ELECTRONICS, vol.88, no.6, pp.625-633, 2001 (SCI-Expanded)
This work presents an attempt related to the importance of the fact that the series resistance value is considered in calculating the interface state density distribution from the non-ideal forward bias current-voltage (I-V) characteristics of Au/n-Si Schottky barrier diodes (SBDs). To examine the consistency of this approach, Au/n-Si SBDs with Si bulk thicknesses of 200 and 400 mum have been prepared. Both diodes showed non-ideal I-V behaviour with ideality factors of 1.14 and 1.12, respectively, and thus it has been thought that the diodes have a metal-interface layer-semiconductor configuration. At the same energy position near the bottom of the conduction band, the interface state density (N-SS) values, without taking into account the series resistance value of the devices, are almost one order of magnitude larger than the N-SS values obtained taking into account the series resistance value.