MEMS Tunable Mid-Infrared Plasmonic Spectrometer

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Stark T., Imboden M., Kaya S., Mertiri A., Chang J., Erramilli S., ...Daha Fazla

ACS PHOTONICS, cilt.3, ss.14-19, 2016 (SCI İndekslerine Giren Dergi) identifier identifier

  • Cilt numarası: 3 Konu: 1
  • Basım Tarihi: 2016
  • Doi Numarası: 10.1021/acsphotonics.5b00290
  • Dergi Adı: ACS PHOTONICS
  • Sayfa Sayıları: ss.14-19


We present a microelectromechanical systems (MEMS) tunable metamaterial, Fabry-Perot interferometer with a widely tunable mid-infrared response. An array of subwavelength holes in a gold film is suspended above a gold reflector, forming an interferometer cavity whose length can be modulated over a range of 1.7 to 21.67 mu m using MEMS electrostatic actuation. Reflectance spectra exhibit the convolution of extraordinary optical transmission through the holes and Fabry-Perot resonances with free spectral ranges from 2900 to 230.7 cm(-1). Measuring the free spectral range enables us to perform in situ interferometric calibration of the cavity length. We present a simple analytical model that describes the experimental and simulated results. This device shows promise as a surface-enhanced sensing substrate with a tunable spectral response.