MEMS Tunable Mid-Infrared Plasmonic Spectrometer

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Stark T., Imboden M., Kaya S., Mertiri A., Chang J., Erramilli S., ...More

ACS PHOTONICS, vol.3, no.1, pp.14-19, 2016 (Journal Indexed in SCI) identifier identifier

  • Publication Type: Article / Article
  • Volume: 3 Issue: 1
  • Publication Date: 2016
  • Doi Number: 10.1021/acsphotonics.5b00290
  • Title of Journal : ACS PHOTONICS
  • Page Numbers: pp.14-19


We present a microelectromechanical systems (MEMS) tunable metamaterial, Fabry-Perot interferometer with a widely tunable mid-infrared response. An array of subwavelength holes in a gold film is suspended above a gold reflector, forming an interferometer cavity whose length can be modulated over a range of 1.7 to 21.67 mu m using MEMS electrostatic actuation. Reflectance spectra exhibit the convolution of extraordinary optical transmission through the holes and Fabry-Perot resonances with free spectral ranges from 2900 to 230.7 cm(-1). Measuring the free spectral range enables us to perform in situ interferometric calibration of the cavity length. We present a simple analytical model that describes the experimental and simulated results. This device shows promise as a surface-enhanced sensing substrate with a tunable spectral response.